摘要
研究了影响单晶硅衬底的多晶硅薄膜太阳电池转换效率的因素，得到该种电池的快速热化学汽相沉积（ＲＴＣＶＤ）的最佳条件．同时改进了制备薄膜太阳电池的若干工艺问题，得到了转换效率为１４．０８％的太阳电池，其填充因子为０．８０８．
The factors affecting the efficiency of polycrystalline silicon thin film solar cells are studied. The improvements include: changing the tie-in of gas system; covering the graphite with pyrogenative graphite; selecting high quality SiH2Cl2; optimizing growth rate and alloy temperature; and designing a new electrode pattern. The effect of film thickness on cell efficiency is also studied. The efficiency of thin film solar cells in our lab reaches 14.08% under the conditions of AM0, 1.08 cm2 and 25℃.
出处
《北京师范大学学报（自然科学版）》
CAS
CSCD
北大核心
2001年第4期511-513,共3页
Journal of Beijing Normal University(Natural Science)
基金
北京市自然科学基金资助项目(4962004)
