溅射输运理论中的经典散射截面

Classical scattering cross section in sputtering transport theory

利用溅射理论中常用的 Lindhard标度相互作用势碰撞散射分析了 Sigmund单幂散射截面与双幂散射截面之间的区别。分析表明 ,对于 Born- Mayer相互作用势碰撞散射 ,双幂截面可以给出比单幂截面好得多的描述。特别对于 Urbassek的 Kr- C相互作用势 。

With Lindhard scaling interaction potential scattering commonly used in sputtering theory, the author analyzed the great difference between Sigmund's single power cross section and the author's double power one. The author's double power cross section can give a much better approximation to the Born Mayer scattering in the low energy region (m^0.1). In particular, for Kr C potential interaction given by Urbassek a few yeas ago, only the author's double power cross sections (m^0.1 ) are used to solve the transport equations can the better approximate results be yielded for the number of recoils. Therefore, it can be asserted that in the low energy collision cascade theory, Sigmund's single power cross section will be replaced by author's double power cross section.