显微标尺标准测量装置的研究

Investigation on the Micrometer Standard Calibrating Apparatus

本文介绍显微标尺测量装置的基本原理及其光学机械结构。该装置最小可测线条宽度为0.6μm、线间距为1.2μm,量程为2mm,分辨率为0.01μm,测量不确定度为±0.1μm。该装置还可以测量高精度计量光栅及激光光盘等透明基体上刻线的间距和线宽值。

In this paper,the principle as well as the optical,mechanical andelectronic constructions of a micrometer standard calibrating apparatus are described.The smallest measurable linewidth of the apparatus is 0.6μm and the smallest measurable pitch is 1.2μm The measuring range of the apparatus is 2mm with a resolution of 0.01μm.The measuring uncertainty is less than 0.1μm.The apparatus can calibrate not only rulers in micrometer dimension but also linewidths and pitches of metrological gratings,laser disks and other transparent material based objects.