红外拍频锁定型绝对距离干涉仪的研究

Research on Infrared Beatwave-locked Absolute Distance Interferometer

利用3.39μm波段双线氦氖激光器作光源实现了作者提出的拍波锁定绝对距离干涉仪新方案。在阐述绝对距离干涉计量的逐级精化理论和上述氦氖激光两级合成波测长方案的基础上,着重分析了双波长拍波锁定干涉测长原理,给出了实验原理图和部分测量结果。分析表明,拍波锁定绝对距离干涉仪的干涉条纹尾数测量精度已达5×10^(-4)。

A novel scheme of heatwave-locked absolute distance interferometer is realized by using a 3.39μm dual-line He-Ne laser as the light source.On the basis of explaining the theory of the absolute distance interferometry and the composition scheme of the two-level synthetic wavelengths,the principle of the heatwave-locked technique is analysed with emphasis.The experimental schematic drawing and some test results are given.The error analysis indicates that the measurement accuracy of the synthetic fringe fraction of the infrared heatwave-locked absolute distance interferometer has come up to 5×10-4