微波谐振腔气体放电的功率吸收与电子密度

Power absorption and electron density of discharge with microwave resonant cavity

用H□10 3 微波谐振腔进行气体放电产生等离子体 .测量了功率吸收与气压的关系 ,并估算出了等离子体的电子密度 .

Plasma is generated with discharge of microwave resonant cavity. Power absorption of the plasma versus pressure is measured and electron density of the plasma is calculated.