摘要
对微结构而言 ,空气表面层阻尼计算模型一般用库特模式 (Couette- type)和斯托克斯模式 (Stocks- type) ,但是已报道的模型计算所得到 Q值最小误差范围只能达到 10 %— 2 0 % .论文考虑了边缘效应的影响 ,建立了一个分析模型 ,对已知的几种横向振动谐振器的 Q值进行了计算 ,并将其与实测值比较 .结果表明此模型所得 Q值的平均误差小于 10 % .
Generally,the Couette-type model and Stocks-type model are used to estimate the slide-film damping of microstructures,but by which the discrepancies in the simulated Q are given only to be 10%—20%.The edge-effect was investigated and an analytical model developed.With which Q of some available laterally-driven microresonators has been calculated.The result is compared to that taints by the present model.It is found that the average discrepancies have been reduced below 10%.
关键词
微谐振器
边缘阻尼
品质因子
横向振动
resonators
Q value
vibrating
air viscous-damping
dissipation
