密封半导体器件内部水汽含量的控制

The control of steam content in the sealed devices

叙述了器件内部水汽含量的来源和对可靠性的影响，采用控制技术后达到了良好的效果。

This Paper describes the resources of steam in the sealed devices, and analyses the effects of steam on the devece relibility. The good results was gotten by using the relative control technology.