摘要
叙述了器件内部水汽含量的来源和对可靠性的影响,采用控制技术后达到了良好的效果。
This Paper describes the resources of steam in the sealed devices, and analyses the effects of steam on the devece relibility. The good results was gotten by using the relative control technology.
出处
《半导体技术》
CAS
CSCD
北大核心
2001年第7期56-58,共3页
Semiconductor Technology