摘要
提出了可以应用于矩形偏转系统的近似多极场模型 ,并给出了应用该模型进行偏转系统优化设计的方法 ,计算比较了旋转对称多极场模型和矩形近似多极场模型的磁场分布 ,应用近似多极场模型对矩形偏转系统的偏转像差进行了优化计算 ,得到了较好的像差校正效果。
A novel multipole approximation of the rectangular deflection system has been developed to optimize the deflection system. Two sets of magnetic field distribution calculated both with the rotational symmetric model and the rectangular multipole model were compared. The deflection aberration correction of the rectangular deflection system was optimized with satisfactory results by using the multipole approximation.
出处
《真空科学与技术》
EI
CSCD
北大核心
2001年第3期199-202,共4页
Vacuum Science and Technology
