彩色PDP光刻工艺的优化理论和设计

Optimization of Lithography Used in Design and Fabrication of Color Plasma Display Panel

提出了用有效时差优化彩色PDP光刻工艺参数的理论和优化设计方法 ,并用实例说明了该理论的实用性。

A novel technique,the effective time difference method,was proposed to simulate lithographic processes and to optimize the various parameters in designing and fabricating color plasma display panel (PDP).The feasibility of the technique was validated with experiments.