摘要
利用固体质谱仪和气体质谱仪分别进行了聚酰亚胺绝缘膜的表面成分及在高温烘烤过程中的放气性能和气体成分分析。结果表明 ,聚酰亚胺材料中不存在污染阴极的有害成分 ,并且经高温烘烤后 ,在 30 0℃时的平衡压强小于 1 9× 10 -3Pa。因此 。
The surface compositions of the polyimide insulation film,its degassing characteristics,and the residual gases compositions during high temperature annealing were studied with solid mass spectrometer and gas mass spectrometer,respectively.The results show that no harmful materials,which may contaminat the cathode,exist in the film;and that the film can be used in vacuum as an insulating material because the average base pressure of the vacuum system after a baking of 300 ℃ is lower than 1.9×10 -3 Pa.
出处
《真空科学与技术》
CSCD
北大核心
2001年第3期220-222,228,共4页
Vacuum Science and Technology
