分压强质谱计校准装置的研制

Calibration System of Partial Pressure Mass Spectrometer

分压强质谱计校准装置用于质谱计的校准。本文介绍了分压强质谱计校准装置的结构、工作原理及分压强测量方法 ,并给出了分压强测量的不确定度分析。

A novel system used to calibrate partial pressure mass spectrometer was developed.The operation principle,the structure and the measurement technique,and the error analysis of the system were discussed.