摘要
用化学气相沉积方法制备了超薄有机硅膜。研究了等离子体聚合工艺过程中 ,工艺条件对膜的特性和沉积速率的影响。结果表明 :沉积掺有苯环的有机硅膜增强了膜的强度和耐腐蚀性能。
Ultrathin organosilicon films were synthesized by chemical vapor deposition. Influence of operating conditions during the plasma polymerization process on the properties of films and the deposition rate were studied. The results show that addition of benzene ring organic substance enhances both the intensity and the anti corrosiveness of the films. We had also applied the newly developed films to several projects successfully.
出处
《真空科学与技术》
CSCD
北大核心
2001年第4期311-314,共4页
Vacuum Science and Technology
