宽气压范围内裂缝天线等离子体特性研究

Discharge Characteristics of Slot Antenna Plasma Source in Broad Pressure Range

给出了气压为 10～ 2 80 0 0Pa时 ,环形倾斜裂缝天线等离子体源的放电特性。实验表明 ,该源在气压为 10～ 2 6 0 0Pa范围内是大体积表面波放电 ,并且在气压为 10和 2 30Pa时清楚地观察到裂缝天线附近石英管内的等离子体有较明显的 8个瓣和 12个瓣 (表面波模式可确定为m =4和m =6 ) ;当气压升高到 40 0 0～ 6 0 0 0Pa时 ,在石英管的底端和不锈钢真空室交界处激励起直径约为 12cm的高密度等离子体椭球 (10 1 1 cm- 3 量级 ) ;在气压为 110 0 0～ 140 0 0Pa时 ,发现等离子体有明显的涡动现象 ;而当气压上升到 2 0 0 0 0Pa以上 。

The discharge characteristics of the circular inclined slot antenna plasma source over a pressure range of 10～28000 Pa were studied.The results show that surface waves are responsible for the large volume discharge in the pressure range of 10～2600 Pa.At the pressure of 10 Pa and 230 Pa,the plasma discharge shows clearly the structures of 8 lobes and 12 lobes,respectively,inside the inner walls of the quartz tube near the slot antenna(The surface wave modes were determined as m =4 and m =6 respectively).As the pressure rises to 4000～6000 Pa,high density plasma(10 11 cm -3 )has an ellipsoid shape with a diameter of about 12 cm at the interface of the quartz tube and the stainless steel cylinder,In the pressure range of 11000～14000 Pa,the vorticity of the plasma can be clearly observed.When the pressure rises to above 20000 Pa,the plasma shows wire like structures.