国外压电陶瓷声马达的发展近况

Recent Progress in Research on Piezo-Ceramic Ultrasonic Motor

压电陶瓷声马达是一种利用压电陶瓷基片或薄膜、电致伸缩材料等功能部件实现驱动的新型驱动器,它不同于传统的电磁马达和静电马达,国外已经在精密仪器、航天航空、自动控制、办公自动化、微型机械系统、微装配、精密定位等领域得到了实际应用。总结了国际上压电陶瓷声马达的最新研究内容及成果,并提出进一步开发研究的几点建议,这对我国压电陶瓷声马达的研究以及相应产品的开发将起到积极的促进作用。

Piezoelectric ceramic ultrasonic motor is a new type of actuator using bulk or film piezoelectric material or electrostrictive material,and is different from conventional electromagnetic motor and electrostatic motor. It has been applied in the fields of precision instruments,aeronautics and aerospace,automatic control,administration automation,micromechanical system,microfabrication process,fine positioner,etc.This paper summarizes recent re- search and achievement on piezo-ceramic ultrasonic motors abroad.At the same time,we give several suggestions for further development that may spur research on piezo-ceramic ultrasonic motor and development of associated products.