蟹脚型微谐振器的横向振动分析

LATERAL VIBRATIONAL ANALYSIS OF CRAB-LEG MICRORESONANT

在结构和受力的对称性并非完全相同的认识基础上 ,建立了蟹脚型静电微谐振器横向振动的简化力学模型 ,分析了其蟹脚型挠性支承杆的受力情况 ,发现其属五次静不定问题 ,据此导出了相关应力、横向位移、弹性常数和谐振频率等设计计算方法 ,与已有静定力学模型的分析结果相比 。

Based on the understanding of symmetry of the mi crostructures and applied load are not same,the lateral vibration of electro-st atic driven comb microresonant which suspended by four crab-leg flexure is inve stigated It is found that the simple mechanical model of it is a super-fluous system with five unknown variables The calculating way of the stress,lateral di splacement,spring coefficient and resonant frequency is deducted Compared with the model of steady system,which published before,the result shows the essential aspect of this problem