二氧化锡薄膜的MOD法制备和表征

Preparation and characterization of SnO_2 thin film by MOD method

采用新颖的金属有机物热分解方法（ＭＯＤ）制备了二氧化锡薄膜。红外分析和热分析表明，先体制备过程中生成了锡的有机物，这对制备质量良好的光学薄膜起了决定作用。对薄膜的红外光谱和紫外一可见先谱的分析表明，薄膜的热处理过程中经历了溶剂挥发、有机物燃烧和析晶等过程，随热处理温度的升高，薄膜的孔率显著减小，薄膜的结构致密，这是由制备过程的特点决定的。

SnO2 thin film was prepared from inorganic materials by using novel MOD method. The precursor and thin film were investigated by FTIR spectra analysis, thermal analysis and ultraviolet-visible light spectra analysis. It is indicated that organic compound of tin is formed during the preparation of the precursor, this is very important for preparing thin film with good optical properties. It is also shown that the thin film undergoes solvent volatilization, organic material burning and crystallization during the heat treatment. It is found that the porosity of the thin film decreased with the increasing of the annealing temperature and the structure of it is dense.