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栅状阵列器件激光视觉检测系统及共面性评价方法 被引量:7

LASER VISUAL INSPECTION SYSTEM AND EVALUATING METHOD FOR GRID ARRAY DEVICE COPLANARITY
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摘要 应用激光线结构光传感器 ,将视觉检测成功应用于栅状阵列器件的共面性测量中 ,建立了测量系统数学模型 ,提出了以三点法为基础的共面性评价方法 ,并对BGA芯片进行了相应的试验研究 ,取得了满意的结果。 Adopting line-structured laser sensor, successfully applies the visual inspection to the grid array device coplanarity measurement. With the mathematics model put forward, the evaluating method based on the three-point seating plane is presented, and corresponding experimental studies on the BGA chip coplanarity are carried out, which achieve satisfactory results.
出处 《机械工程学报》 EI CAS CSCD 北大核心 2001年第5期78-80,89,共4页 Journal of Mechanical Engineering
基金 国家自然科学基金资助项目! (6 990 6 0 0 1)
关键词 栅状阵列器件 共面性评价 三点法 视觉检测 激光测量 Grid array device Coplanarity Three-point seating plane method
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