摘要
简要介绍了基于磁控射频溅射技术的Si3 N4 薄膜沉积技术及Si3 N4 薄膜基于剥离 (lift-off)技术的微加工技术。
The depositon of silicon nitride film based on RF magnetron-sputtering and the micorfabrication of silicon nitride film based on lift-off technique are described in this article. The experiment result showed that it is an effective method of Si 3N 4 film's fabrication for microsensor and MEMS purpose.
出处
《传感器技术》
CSCD
北大核心
2001年第3期51-53,共3页
Journal of Transducer Technology
关键词
微型传感器
氮化硅薄膜
微加工技术
microsensor
MEMS
silicon nitride film
R.F. magnetron-sputtering
lift-off technology
microfabrication technology
