摘要
提出了基于二维泊松方程解的平面结场板结构的二维表面电场解析物理模型 .在该模型基础上 ,分析了衬底掺杂浓度、场板厚度和长度对二维表面场分布的影响 .解析预言的场分布与击穿电压的计算结果与先前的数值分析基本符合 .
Based on Poisson Equation,an analytical model is proposed for the 2 dimensional surface electric field profile of the planar junction with a single step filed plate structure for the first time.The dependence on the doping concentration,field plate thickness and length of the surface electric field profile has been analyzed.The calculated breakdown voltages show good agreement with the previous numerical results.The presented analytical model is especial useful in design of the filed plate termination of the power devices and SPIC.
关键词
平面结
场板结构
电场分布
击穿电压
planar junction
field plate termination
surface field
breakdown voltage
