摘要
声表面波 (SAW)加速度传感器的精度高 ,具有数字量输出、体积小、功耗低、抗干扰力强、可靠性高等优点。根据SAW加速度传感器工程化的需要 ,对SAW加速度传感器中所采用的压膜阻尼进行了理论分析 ,并采用机电等效模拟技术对微间隙压膜阻尼进行了仿真 ,取得了较好的效果。
The accelerometers based on the surface acoustic wave(SAW) devices have the advantages of extremely high sensitivity and precision.According to the demands of engineering,the squeeze film damping theory has been described.The squeeze film damping in the SAW accelerometer is simulated using equivalent circuit of mechanics to electronics. The result shows the squeeze film can provide enough damping force for the accelerometer.The analysis methods presented in this paper are available to other sensors.
出处
《测控技术》
CSCD
2001年第3期20-23,共4页
Measurement & Control Technology
基金
航空基金
国防基金资助项目 !(98J9.1.9HK0 3 0 5 )
关键词
声表面波加速度传感器
压膜阻尼
模拟技术
加速度计
SAW accelerometer
squeeze film damping
equivalent circuit of mechanics to electronics
