基于FET结构的Pt-LaF_3混合膜溶解氧传感器

Pt-LaF_3 Mixture Film Dissolved Oxygen Sensor Based on FET Structure

研制了一种基于 FET结构的 Pt- L a F3混合膜全固态溶解氧传感器 .对 Pt- L a F3敏感膜的敏感机制以及传感器的器件结构和响应特性进行了分析 ,并实际测试了器件特性 。

A Pt-LaF 3 mixture film solid-state dissolved oxygen sensor is descsibed based on FET structure by using carbon paste film forming method.The sensing mechanism,the device structure and the response characteristics are analyzed.And the device's characteristics are measured as well.The response curves of ΔV rs (the gate voltage variety)-(dissolved oxygen concentration) are bound at different bias and different temperature.