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一种改进的VLSI关键面积计算模型和方法 被引量:2

An Improved Model and Method of Calculating the VLSI Critical Area
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摘要 从故障机理上研究了现有的关键面积计算模型 ,改进了其开路 /短路关键面积计算模型的故障核 ,从而得到适用于一般版图图形结构的关键面积计算方法 .这对计算 VL SI关键面积、指导版图优化设计和提高 IC成品率有重要意义 . Fault mechanism of available critical area model is studied.An improved fault-kernel of open/short defect is presen- ted, which is suitable for the critical area calculation of general VLSI layout structure.It is important to the calculation of VLSI critical area and the optimization of IC layout design.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2001年第9期1212-1216,共5页 半导体学报(英文版)
基金 国家科技攻关96-738资助项目~~
关键词 关键面积计算模型 成品率 VLSI 集成电路 defect critical area yield
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