摘要
用激光激发超声兰姆波是近年提出的一种新的微传感器构成方法。本文从光－热－声波转换的基本原理出发，推导出激光在硅薄膜中激发兰姆波的条件和产生给定模式兰姆波的方法，给出了具体的实验设置、初步实验结果和数据分析。
A modulated continuous wave argon ion laser has been used to get lamb waves in silicon membrane. In this report, the basic principles of conversion for optics to thermal then acoustic waves are deduced. The experimental set - up, the analysis of the results and the possibl way to obtain a given mode of lamb wave are described.
出处
《光学精密工程》
EI
CAS
CSCD
2001年第4期299-303,共5页
Optics and Precision Engineering
基金
中国科学院院长特别基金
国家973(G1999033102)资助
