Y旋转ST-石英基片上的准纵漏表面声波

Quasi-longitudinal leaky surface acoustic wave on Y-rotated cut ST-quartz substrates

文章主要研究了Y旋转ST 石英基片上准纵漏表面声波 (快速声表面波 )的传播特性。它的相速度是常规瑞利波的两倍 ,在某些传播方向可高达 70 0 0m/s ;在理论与实验上寻找了束偏向和延时温度系数均较小的切割传播方向 ,例如 ,沿欧拉角 (0° ,15 5 .2 5°,42°)方向的准纵漏表面声波的相速度为 6 15 3m/s,延时温度系数为 11ppm/℃ ,其声波能流方向基本上与波的传播矢量方向相一致。实验证明放置于基片表面的液体对准纵漏表面声波的吸收不大 ,说明声波的质点振动与传播方向一致 (沿表面方向 ) ,具有纵波的性质。

This paper studies the propagation properties of Quasi longitudinal leaky surface acoustic wave (QLLSAW) on Y rotated cut ST quartz substrates. The phase velocity of QLLSAW on the ST quartz substrate is about twice that of normal SAW, and in some directions even up to 7000m/s. Both theoretical and experimental results show that QLLSAW propagating along some directions are with small power flow deviation and small temperature coefficient, such as along the direction of Euler angle(0°,155.25°,42°),the phase velocity is 6153m/s, temperature coefficient is 11ppm/℃ and the energy flow of QLLSAW is along the direction of wave vector. When liquid was put on the surface of the substrates, QLLSAW had little absorption by liquid, which proved that the direction of particle vibration is parallel with the surface, and demonstrates that the wave is of the properties of longitudinal wave.