小F数衍射微透镜阵列光学性能研究

THE OPTICAL PERFORMANCE OF SMALL F NUMBER DIFFRACTIVE MICROLENS ARRAYS

本文基于小光点扫描 ,在国内首次提出了一种测试小 F数衍射微透镜阵列光学性能的方法 .利用光通信用半导体激光器和探测器建立了一套测试系统 ,并对所研制的大阵列 ,小单元尺寸的多相位菲涅耳衍射微透镜阵列的衍射效率和点扩散函数进行了测试 .结果表明 ,衍射微透镜实际衍射光斑比理论衍射受限光斑扩展不大 ,8相位和 1 6相位石英微透镜的衍射效率分别高达 80 .2 %和 87.5 % ,说明本实验室对多相位的设计理论和制作工艺已基本掌握 。

Based on the small spot scanning theory,the authors presented a special method to test the optical performance of diffractive microlens arrays with small F number.The two charaters:point spread function and diffractive efficiency of large area quartz and silicon microlens arrays with small element dimension have been measured.The results show that the diffraction spots of the microlens arrays are only a bit greater than the theoretical diffraction limited spots sizes and the diffractive efficiency of the 8 phase level and 16 phase level quartz microlens arrays are 80.2% and 87.5% respectively,which suggests that the design theory and fabrication process of the multi phase level diffractive microlens arrays are grasped by the authors.