椭圆偏振光谱中的主角测量条件分析

Analysis of Measuring Condition for Principle Angle in Spectroscopic Ellipsometry

对椭圆偏振光谱中的主角测量条件进行了分析。当入射角等于主角 θp 时 ,椭偏参数的相位为 90°,据此给出了当材料的介电函数已知时对θp 进行数值和解析计算的公式和方法 ,并可相应地计算出椭偏参数的幅值 ρp0 。在θp 入射角下测量可获得较高的数据精度。主角条件下椭偏参数 ρp0 及其相位Δp 的实验测量结果与计算值符合得很好。本工作给出的计算公式和方法可在其他光谱实验中获得应用。

The measuring condition for principle angle in spectroscopic ellipsometry is analyzed. As the incident angle is equal to principle angle θp, the phase angle of ellipsometry parameters is 90°. It gives a way to obtain θp from numerical calculation and analytic equation as the dielectric function of the material is known, and the amplitude ρp0 of ellipsometry parameters can be calculated accordingly. Higher precision of data can be acquired as measuring at incident angle of θp. The experimental results of Δp and ρp0 correspond very well with the calculated ones. The calculation formulas and methods given in this work can be applied to other spectroscopic experiments.