亚波长结构对10.6μm的抗反射表面的研制

Design and Fabrication of Antireflection Structured Surfaces

运用等效媒质理论对亚波长结构的抗反射表面进行了分析 ,设计出了一种抗反射表面结构 ,并利用二元光学制作工艺技术 ,对这种表面进行了实验制备。测试结果表明 ,这种表面结构就像单层抗反射膜一样 ,具有很好的增透效果 ,表面结构的等效折射率相当于镀层材料折射率 。

On the basis of the effective medium theory (EMT), both one-dimensional and two-dimensional periodic structures of antireflection surface are investigated and analyzed. The 2-D relief-structure patterns for antireflection are designed and fabricated on silicon wafers by binary optical processing methods. This 2-D structure can be used as an alternative to thin-film coatings to enhance transmission at the boundary between two different media.