用STM对高速磨削表面微观形貌的研究

Research on the Micro-topography by means of STM during High-speed Precision Grinding

本文运用扫描隧道显微镜 (STM)对微观三维表面形貌进行了研究 ,与常规方法对高速磨削表面粗糙度的影响进行了比较 。

This paper described the research on the micro topography in high speed precision grinding by means of Scanning Tunneling Microscopy(STM). Compared with the effects on surface roughness by conventional methods, the factors of high speed precision grinding which influences three dimension micro surface topography have been discussed.