BFEL光学谐振腔真空机械五维精密遥控调节装置

BFEL Optical Cavity's 5-D Precise Remote-Control Adjuster

论述了北京自由电子激光 (BFEL)光学谐振腔真空机械五维精密遥控调节装置的设计考虑 .讨论了自由电子激光谐振腔不同于一般激光谐振腔的特点 .介绍了通过波纹管实现光腔真空室内外的位移及角度调节的传递方法 .采用粗细精三级传动精度设计 ,使BFEL光腔腔镜不仅具有五维的精密遥控调节机能 ,而且实现了调节范围± 5mm ,分辨率 2 μm ,角度调节范围± 3°,分辨率 0 .5″的实验结果 .该机构自 1

The design of the BFEL optical cavity's 5 D precise remote control adjuster is described. This paper discusses the special chracteristic of the FEL cavity,and introduces how to inplement the transfer of the cavity's displacement and angle adjusting inside and outside the vacuum chamber. This optical cavity adjuster is designed with 3 level control precision,its displacement's adjustment range is ±5mm, the resolution is 2μm,the angle's adjustment range is ±3° and the resolution is 0.5″. This control system has been used in BFEL's experiments.