扫描电镜的最新发展——低电压扫描电镜(LVSEM)和扫描低能电镜(SLEEM)

The new development in SEM: LVSEM and SLEEM

本文从仪器和电子光学的观点评述了在扫描电镜上装备场发射枪以后 ,向低电压扫描电镜和扫描低能电镜发展中的一些重要问题。讨论了低能和极低能时二次电子和背散射电子的特性 ,低电压扫描电镜和扫描低能电镜能量段的划分 ,实现低电压扫描电镜和扫描低能电镜的困难 ,以及利用阻滞场透镜的解决办法。讨论了低能情形下信号的探测 。

Some important respects in the development of SEM towards LVSEM and SLEEM after being equipped with FEG have been reviewed from the view points of electron optics and instrumentation. The characteristics and detection of secondary and backscattered electron in low energy, the energy range of LVSEM and SLEEM, the difficulties and solving method of retarding field lenses in realizing LVSEM and SLEEM, the disturbing electromagnetic field, and the final resolution of these instruments were also reviewed in the present paper.