电子背散射衍射系统的研制和改进

Development of an electron back-scattering diffraction system for SEM

电子背散射衍射装置是获取材料的亚微米的范畴晶体学信息扫描电镜附件 ,此装置可在观察材料的形貌及分析成分的同时研究材料的取向关系。本文介绍了两种不同档次的电子背散射衍射接收系统 ,该系统的CCD以快速方式接收的灵敏度为 5mlux,积累方式接收的灵敏度为 1 0 μlux ,分辨率为 51 2dpi,像元数分别为 51 2× 51 2× 8bit、51 2× 51 2× 1 6bit,扫描卡最高的分辨率为 4 0 96× 4 0 96,并成功地安装在北京有色金属研究总院JSM 84 0扫描电镜上。此系统设计合理、结构简单、操作方便安全。

Electron backscattering diffraction is an important technique for obtaining crystallographic information with a scanning electron microscope (SEM)at submicron resolutions level. It allows the relationship among crystallography, morphology, chemistry and some physical properties of a sample to be investigated. This paper described an electron backscattering diffraction system, which has been successfully developed for JSM 840 SEM in GRINM. The CCD sensitivity of the system is 5 millilux for the mode of live video rate, and 10 microlux for the normal integrate mode, the resolution of the CCD is 512 dpi. The highest resolution of scanning card is 4096 X 4096. The design of the system is reasonable, and the construction is compact. The system is ease for operation, safe and reliable. The bands of diffraction pattern can be automatically identified and indexed by using our software.