摘要
阐述了Fabry-Perot腔的工作原理以及在精细光谱结构研究、激光技术等领域的应用.结合作者的工作,给出了Fabry-Perot腔在微机械传感器和高速光电探测仪器研制这两个方面的新应用.
The work principle of Fabry Perot etalon is shortly analyzed.The traditional applications in hyperfine structures of a spectrum and in laser systems of Fabry Perot etalon are described.The novel applications of Fabry Perot etalons in micromachined Si pressure sensors and in ultra high speed instruments are also discussed in detail.