微机电系统传感器的制造和应用

The Fabrication and Application of Micro-Mechanical System Transducer

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摘要本文叙述微机电系系统传感器的设计制造技术和主要应用 The design and fabrication technolgy and main applications of MEMS transducers are described.

作者谢国章

机构地区河海大学

出处《世界科技研究与发展》 CSCD 2001年第3期20-22,共3页 World Sci-Tech R&D

关键词微机电系统传感器微细加工应用制造设计 MEMS, transducer, microfabrication, application

参考文献4

1[1]Euisik Yoon, Kensall D. Wise. An Integrated Mass Flow Sensor with On-Chip CMOS Interface Circuity. IEEE Trans. on Electron Devices, 1992,39(6): 1376 ～ 1385
2[2]Y. Yoshi. 1 Chip Integrated Software Calibrated CMOS Pressure Sensors with MCU, A/D Converter, D/A Converter, Digital COmmunication Port,signal COnditioning Circuit, and Temperature Sensor. Proc. Transducers'97, Chicageo, June 16- 19,1997: 1485～ 1487
3[3]Jonathan Bemstein, etc. Low-Noise MEMS Vibration sensor for Geophysical Applications. J. MEMS, 1999, 8(4) :433 ～ 438
4[4]Giseal Lin, etc. Surface Micrmachined Polysilicon Heart Cell Force Transducer. J. MEMS, 2000,9(1):9～16

世界科技研究与发展

2001年第3期

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