摘要
从类型、原理和结构等角度重点讨论了当前压电超声直线微电机的研究现状和发展方向 ;以此展开 ,论述了目前压电超声微电机研究领域尚需深入探索的关键技术 。
According to the type and principle and structure, this article discusses the research status and the development direction now of piezoelectric ultrasonic line micro motor. On this base, some key technology and application future of piezoelectric ultrasonic micro motor are analyzed by this paper.
出处
《微电机》
2001年第3期31-34,共4页
Micromotors
基金
教育部博士点基金资助课题 (19990 0 5 6 0 7)
关键词
压电超声微电机
MEMS
直梁结构
压电材料
piezoelectric ultrasonic micro motor
MEMS
research status
development direction
key technology
application future
