摘要
微光机电系统 (MOEMS)是在微机电系统 (MEMS)基础上发展起来的一种新技术系统 ,它是由微光学、微电子和微机械相结合而产生的一种新型的微光学结构系统 ,MOEMS在信息、军事、航天、医学、工业等领域有着广阔的应用前景 ,综述了近年来微光机电系统的发展和应用。
Micro-opto-electro-mechanical System(MOEMS)is a new system based on micro-electro-mechanical system(MEMS),which is the new micro-optical system with the combination of micro-mechanics, micro-electronics and micro-optics.MOEMS has wide applications in the future in many fields suc communication, military affairs, spaceflight, medicine, and industry. A brief overview of some recent advances in MOEMS is given, mainly in its components,fabrication technology and applications.
出处
《微细加工技术》
2001年第3期1-8,13,共9页
Microfabrication Technology
