摘要
图形化SMA薄膜的图案及其结构参数的选择对SMA/Si复合驱动膜的性能有决定性的影响 ,利用有限元方法对两种图案设计进行了对比分析。通过结构分析和温度场分析 ,圆形电阻条变宽的设计有助于进一步提高驱动膜的性能。仿真结果对于优化驱动膜的设计具有指导意义。
Pattern design and its parameters for patterning SMA thin films are crucial for the performance of the SMA/Si composite membrane microactuaotr. Two different pattern designs are compararively analysed in FEM. By means of structural analysis and coupled thermal-elecrtical analysis, it shows that spiral strips with nonuniform width will improve the performance of the actuator further. The simulation results are helpful for the optimization of the microactuator structure.
出处
《微细加工技术》
2001年第3期18-21,73,共5页
Microfabrication Technology
基金
高等学校博士学科专项科研基金资助课题 (2 0 0 0 0 2 4 813)
关键词
SMA
硅
复合膜
微驱动器
形状记忆效应
双金属效应
优化设计
Microactuator
Finite element analysis(FEA)
Shape memory effect(SME)
Bimetal effect
Optimization design
