摘要
使用墙式结构作为FED器件内的支撑 ,使用Algor专用力学有限元软件对器件各种结构的力学特性进行了数值计算 ,同时参照器件的电学特性后确定了支撑墙的分布密度、安装位置和装配误差等工艺参数 ,并完成了现有器件条件下的工艺实现 ,得到理想的结果。
The wall structure is chosen as the spacer of FED.The Algor software is used for digital calculation of the mechanical characteristics of various structures of FED device.Referring its electronics properties,the distribution density,mounting position and allowed assembly error of the spacer are determined.The device has been completed under existing processing conditions and satisfied results have been obtained.
出处
《微细加工技术》
2001年第3期26-30,共5页
Microfabrication Technology
