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PDMS微小流路微加工技术的研究 被引量：4

Study on Microfabrication of Polydimethysiloxane(PDMS) Microfluidic System
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摘要 PDMS(Polydimethylsiloxane ,聚二甲基硅氧烷 )微小流路的微加工技术 ,由于具有加工周期短 ,加工成本低 ,可进行批量生产 ,易获得高深宽比的微小结构等特点 ,日益成为微小流路加工技术中一个研究热点。对PDMS微小流路的特性进行了分析 ,实验结果表明 ,该方法完全适用于 μTAS系统及其他生物化学分析仪器中微小流路的加工。 The microfabrication of PDMS microfluidic system is becoming the research hotspots of manufacturing microfluidic system because of it's short turnround ,low cost,mass?produced potential and easy obtainable microstructure with high aspect ratio.The characteristics of PDMS microfluidic system is analyzed.The experimental results show that this method is well suitable for manufucturing μTAS (Miniaturized Total Analysis System)and microfluidic system in other biochemical analysis instruments.
作者 金鹏 谭久彬 刘岩
机构地区 哈尔滨工业大学自动化测试及控制系 黑龙江广播电视大学
出处 《微细加工技术》 2001年第3期31-34,共4页 Microfabrication Technology
关键词 微小流路 集成电路 微加工技术 聚二甲基硅氧烷 PDMS(Polydimethysiloxane) High Aspect Ratio Microstructure μTAS Deepetching Process,Microreplication Process
分类号 TN405 [电子电信—微电子学与固体电子学]
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参考文献12

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同被引文献22

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引证文献4

二级引证文献6

微细加工技术
2001年 第3期

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