摘要
采用由金属蒸汽真空弧 (MEVVA)离子源引出的强束流脉冲金属钨离子对4Cr5MoV1Si(H1 3)钢进行了离子注入表面改性研究。用针盘式磨损机测得样品的耐磨性提高两倍左右。使用卢瑟福背散射谱 (RBS)测量了钨在样品中的浓度深度分布 ;采用X射线衍射考察了注入样品的表面微结构 ;按照非线性碰撞理论 ,讨论了样品的耐磨性、表面成分、结构与注入参数 (主要是注入能量和注入束流密度 )的关系。
Tungsten ions extracted from a metal vapor vacuum arc(MEVVA)ion source were implanted into 4Cr5MoV1Si(H13) steel.The wear resistance of tungsten ion implanted sample increased by about 2 times.Rutherford backscattering spectrum(RBS)was used to measure the depth contribution of tungsten density in the sample.Observation of surface microstructure of the sample was carried out by X?ray diffration analysis.The relation of the sample's wear resistance,surface composition and structure with the implantation parameters (mainly,the implanted ion energy and current density) was discussed according to nonlinear impact theory.
出处
《微细加工技术》
2001年第3期46-50,共5页
Microfabrication Technology
基金
国家自然科学基金 (5 96710 5 1)
南通工学院资助项目 (110 7)
