摘要
分析了镜面的反射系数与光驻波场的关系 ,详细讨论了影响双反射面形成的驻波场的各种因素 ,并对TE波和TM波驻波场的光强分布进行了模拟和比较 ,最后得到了一些对实验有指导意义的结论。
The relation between reflectance of reflector and light intensity distribution of standing?wave field is analyzed.Various factors that influence light standing?wave field formed by two reflectors are discussed in detail,and light intensity distributions of TE wave and TM wave are simulated and compared respectively.Many instructive conclusions about light standing?wave in nanofabrication are drawn,which will do good to experiment.
出处
《微细加工技术》
2001年第3期51-55,共5页
Microfabrication Technology
基金
中国科学院知识创新工程资助项目(A2K0009)