准分子紫外光源低温生长金属薄膜

Low Temperature Photo-Induced Metal Deposition Using Excimer UV Radiation

报道了紫外光源在制备金属薄膜材料方面的应用研究 .金属钯是一种优良的催化剂 ,首先在各种衬底上面淀积钯的金属有机化合物薄膜 ,通过紫外光分解钯的金属有机化合物 ,形成数埃到几十埃的钯膜 ,然后再利用钯的催化效应 ,在无电极电镀液中淀积出几十纳米到几微米厚的各种金属薄膜(如Cu、Au、Ni等 ) .

Pre nucleation of surfaces with palladium from thin palladium acetate films on different substrate materials by Excimer UV induced decomposition at low temperature is described. The deposition rate of the palladium with Excimer laser radiation depends on the substrate materials while the decomposition processes in solid films with Excimer lamp are practically independent of the substrate properties. These results show that the decomposition mechanism of palladium acetate with incoherent Excimer UV radiation is different from that with Excimer laser radiation where the included deposition appears to be mainly photothermal. The deposited palladium can act as an activator for subsequent patterned metal deposition technics in which micrometer thick copper, nickel, or gold layers with good electrical resistivity are fabricated.