目视法控制薄膜厚度的探讨

The control of the thickness of plastic sheets by optical perspectives

本文根据光学中的薄膜干涉和色品图上颜色的变化，从理论上给出膜厚控制的目视法。用玻璃基片镀ＭｇＦ２单层膜时，目视紫蓝色刚一出现即关闭蒸发源，膜厚误差小于１０ｎｍ．目视法控制膜厚度的关键是确定可以避开钼舟透射光的角度，以便准确观察基片反射光。

The optical perspectives of controlling thickness of plastic sheets are advanced theoretically according to the optical interference of plastic sheets and the change of colors in the color-appreciation diagram. It had hardly appeared when the steam turned off. Average error of thickness of plastic sheets is less than 10mm. The key to the control of thickness of plastic sheets by optical perspectives lies in the confirmation of the angle from which molybdenum perspective can be avoided so that the basic projection can be investigated precisely.