任意结构的电容耦合直流放电的数值模拟(英文)

Numerical Simulation of Capacitively Coupled DC Discharge in Arbitrary Configuration

本文描述了二维模型下电容耦合的直流放电计算过程。发展了适用于任意结构下非正交坐标系的算法。提出了决定边界条件的相关技术。程序设计中发展了网格生成系统 ,使程序更适用。并且用图表说明了半导体机械中的一种典型的应用。

A calculation procedure for capacitively coupled DC discharge has been described under the two dimensional model. The scheme has been developed for a non-orthogonal coordinate system in arbitrary configurations. The relevant technique of determine the boundary condition has been adopted. In order to be a more flexible design, the grid generation system has also been developed in the program. A typical application in semiconductor machine has been illustrated.