摘要
软Ｘ射线扫描显微术、显微谱学等方面的研究需要有纳米量级的聚焦光斑，在同步辐射光束线建造中实现Ｘ射线的衍射限聚焦十分重要。设计采用了具有较高相干通量的波荡器辐射光源，利用衍射光学元件波带板实现近衍射限成象。引入了冗余照明的概念，以保证成象元件的空间相干照明。充分考虑水平和垂直方向的相空间匹配问题，以提高输出通量。设计聚焦光斑尺寸５０ｎｍ，输出光通量可达 １０９ｐｈｏｔｏｎｓ／ｓ· ０． １％ＢＷ。
A focused beam in nanometer scale is important for soft X - ray scanning microscopy and microscopic spectroscopy. A plan has been proposed to realize diffraction - limited focusing of X - ray, during the construction of synchrotron radiation beamline. In this design, light source from undulator radiation, with high coherent flux, is employed. A zone plate, a kind of diffraction optical element, is used to focus the soft X - ray beam into diffraction - limited spot. A concept of redundant illumination is introduced to ensure the spatial coherent illumination of the imaging element. In order to improve the output, special consideration is posed to phase space matching in horizontal and vertical directions. The designed focus spot size is 50nm, flux output is 109photons/s·0. 1% BW.
出处
《核技术》
CAS
CSCD
北大核心
2001年第7期547-552,共6页
Nuclear Techniques
