高分子薄膜电阻型湿度传感器

Thin Film Resistance Humidity Sensor Using Polyelectrolyte

本文介绍一种新型的高分子薄膜型湿度传感器的结构、感湿原理,制造工艺过程及其湿敏特性。湿敏材料由高分子电解质——聚苯乙烯磺酸钠、粘结剂聚乙烯醇、交联剂的水溶液——按一定重量比配制而成。为了改善其湿敏特性和抗湿性,对已涂复湿敏膜的传感器进行低温等离子体处理。这种新型湿度传感器具有体积小(仅4mm×6mm)、制造工艺简单、成本低、响应速度快等优点。而且它的湿敏特征量——电阻的对数与相对湿度成线性关系,便于二次仪表设计,可望在各个领域的湿度实时检测和控制中获得广泛应用。

In this paper the structre, sensing theory, the fabrication processes and response characteristicses of a new tape humidity sensor were described. Its humidity-sensitive film is made from a mixed aqueous solution of sodium polystyrenesulfonate (Napss), crosslinking agent and polyvinyl alcohol (PVA) on a some weight ratio. In order to improve its humidity sensitive response characteristicses and ability against water, plasma processing in low tempera- ture to sensor covered humidity-sensitive film was done. The sensor has the following advantages of small dimention, low cost, simple technology, fast response time, in addition its response curve is linear as an exponential range of relative humidity.