微加工技术与微光机电系统的研究与应用

Microfabrication Technique and Micro-Opto-Electro-Mechanical Systems

本文简要介绍了微光机电系统 (MOEMS)中的微加工技术 ,主要是硅微机械加工技术和LIGA技术 ,并介绍了微光机电系统在信息与通讯、汽车工业、生物医学、航空航天。

This article introduced two main microfabrication techniques of Micro Opto Electro Mechanical Systems (MOEMS). They are silicon micromachining technique and LIGA technique. Applications of MOEMS in the field of information and communication, automotive industry, biology and medicine, spaceflight and aviation, defense and military were also introduced.