位敏探测器表面反射损耗的优化

Optimization of Reflection Loss on the Surface of Position-sensitive Detector

本文通过计算 Si O2 单层以及 Si O2 和 Si3N4组成的双层减反膜对不同波长的反射率 ,给出了位敏探测器表面反射损耗的优化。

Through computing the reflectance of antireflective coatings combined with single SiO 2 or SiO 2 and Si 3N 4 on the surface of position sensitive detector for different wavelength, the optimum data can be obtained.