摘要
本文介绍了锁相放大技术在等离子腐蚀过程中的应用 ,详细的论述了锁相放大器的设计过程 ,并对锁相放大器的性能进行了测试 ,结果表明 ,应用锁相放大技术进行终点监测过程中的弱信号提取 ,有效而可靠 。
The application of Lock in amplifer in monitoring process of plasma corrosion was recommended in this paper,and discussed the design of lock in amplifer.By the measurement of the nature of lock in amplifer prored the effectivity and reliablity of application of the lock in amplifer in weak signal extracting.It improved the sensitivity of montitoring.
出处
《长春光学精密机械学院学报》
2001年第2期36-38,共3页
Journal of Changchun Institute of Optics and Fine Mechanics
