256×256 Si微透镜阵列与红外焦平面阵列单片集成研究

MONOLITHIC INTEGRATION OF 256×256 Si MICROLENS ARRAYS WITH INFRARED FOCAL PLANE ARRAYS

基于标量衍射理论设计了 8位相菲涅尔衍射微透镜阵列 .利用多次曝光和离子束刻蚀技术在大规模面阵( 2 5 6× 2 5 6) Pt Si红外焦平面阵列的背面制作了单片集成微透镜阵列样品 (单元面积为 3 0μm× 4 0μm ) .测试结果表明 ,单片集成微透镜的红外焦平面阵列样品的信噪比提高了 2 .0倍 .

8-phase-level 256×256 element diffractive microlens arrays with element dimension of 30 μm×40 μm were fabricated on the backside of the PtSi infrared focal plane arrays (IRFPA) based on the scalar diffraction theory and computer aided design. The measurement results indicate that the ratio of the signal-to-noise of the PtSi IRFPA sample with microlenses is increased by a factor of 2.0.