应用SPM技术开展纳米切削加工

Applying SPM in nanomachining

纳米科技发展和应用的一个重要问题是 ,解决纳米尺度上的操作、加工和控制。本文针对目前传统机械加工方法在纳米量级加工能力上存在的不足 ,以及利用SPM探针针尖进行纳米加工在工程应用中所面临的技术问题 ,提出应用SPM原理和技术 ,直接使用金刚石刃具进行材料的纳米量级去除加工方法。文中应用该方法对石墨以及金属材料进行了微去除加工实验 ,研究和考察了纳米切削加工时 ,切屑形成和良好加工表面的形成。结果显示 ,这是一种好的纳米加工方法 ,既可作为材料加工过程的研究手段 。

One of the very important problems for the development and application of nanotechnology is how to manipulate, control or machine a material at nano scale. As the traditional machining would not be sufficient for increased demand of nanomachining, and the fabrication by using SPM probe would exist some technical difficulties, it was proposed in this paper that a good method for nanomachining can be developed by using SPM technology in diamond cutting. Some experimental results were given which show excellent abilities for machining at nano scale and for research of material removal mechanism.